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发明名称
OBJECTIVE LENS TURRET FOR INSPECTING A WAFER
摘要
申请公布号
KR20050066412(A)
申请公布日期
2005.06.30
申请号
KR20030097698
申请日期
2003.12.26
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
YANG, DAE SEOK
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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