DISPLAY DEVICE USING THIN FILM ELECTRON SOURCE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To perform patterning of an upper electrode required to array an electron source with an MIM type tunnel diode structure without deteriorating the performance of the electron source with the diode structure.

SOLUTION: In the display device for producing a vacuum atmosphere for a space surrounded with a pair of substrates and a frame member, one substrate has a plurality of scanning electrodes disposed in row directions; a plurality of signal electrodes disposed in column directions and having openings at intersection parts with the scanning electrodes; a plurality of upper electrodes disposed at every signal electrode and covering the openings; and first insulating films disposed between each upper electrode of the openings and each scanning electrode and composing the electron source with the diode structure together with the upper electrodes and the scanning electrodes. The upper electrodes are electrically insulated at every signal electrode by means of steps disposed on second insulating films formed on each signal electrode.

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