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发明名称
摘要
申请公布号
JP3664794(B2)
申请公布日期
2005.06.29
申请号
JP19960032059
申请日期
1996.02.20
申请人
发明人
分类号
F28F19/04;F28F21/02;H01L21/304;H01L21/306;(IPC1-7):H01L21/306
主分类号
F28F19/04
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