| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide with which mass-productivity is improved and a low cost is realized. SOLUTION: A polyimide resin precursor layer 2 is continuously applied on a long-sized base material 1 and hardened to form a lower clad layer 3. Then a photosensitive polyimide resin precursor layer 4 is continuously applied on the lower clad layer 3 and continuously exposed in specified pattern via a photomask 5, and then continuously heated. Then the photosensitive polyimide resin precursor layer 4 is developed to be formed in the specified pattern, and is then hardened to form a core layer 6 in the specified pattern on the lower clad layer 3. Further, a polyimide resin precursor layer 8 is continuously applied on the lower clad layer 3 to cover the core layer 6, and is hardened to form an upper clad layer 7. COPYRIGHT: (C)2005,JPO&NCIPI |
