METHOD FOR TUNING MICROWAVE CIRCUIT AND APPARATUS FOR AUTOMATICALLY TUNING MICROWAVE CIRCUIT

摘要

PROBLEM TO BE SOLVED: To accurately attain impedance matching. SOLUTION: In this method and the apparatus: a reflection coefficient of a load to be impedance-matched when the load is actually connected with a microwave generator via an EH matching tube is calculated according to an appropriate and clear algorithm; the correspondence ofθE×LE and the correspondence ofθH×LH in the figure used in a process of calculating plunger positions for matching short plungers for the use of an E face and an H face have relatively gentle changes in phase anglesθE andθH for changes in respective positions of the short plungers for the E face and the H face; thus a large difference can be prevented from occurring in calculating both the correspondence relations beforehand; positions for matching the respective short plungers for matching the impedance can be correctly obtained; and as a result, the impedance matching can be accurately attained. COPYRIGHT: (C)2005,JPO&NCIPI