摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pad conditioner small in a fluctuation width of a dress rate. <P>SOLUTION: This pad conditioner is formed by fixing super-abrasive grains to a predetermined surface of disk-like base metal 1. The pad conditioner has a angle-shaped part 12 in an annular shape in an outer peripheral part of the disk-like base metal 1. A large super-abrasive grain 2A is electrodeposited in a top part 12A of the angle-shaped part 12, and small super-abrasive grains 5 are electrodeposited in a skirt part 12B of the angle-shaped part 12. Polishing surfaces of the top part 12A and the skirt part 12B smoothly continue. In a cross section passing through the center of the disk-like base metal, the top part 12A of the angle-shaped part 12 is formed as a circular arc, and both side skirt parts 12B of the circular arc are formed as a straight line having an inclination lowering for going away from the top part 12A, and desirably form an inclined face angle θ of 1° to 15° with the straight line parallel to a bottom surface of the disk-like base metal 1. <P>COPYRIGHT: (C)2005,JPO&NCIPI |