发明名称 PROCESS FOR FABRICATING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a process for fabricating a semiconductor device arranged such that a fuse can be cut easily without thinning an insulation film on the fuse. SOLUTION: An nMOSFET 10 for cutting a fuse is formed on a silicon substrate 1 and a fuse F connected with the nMOSFET 10 for cutting a fuse is formed on that silicon substrate. A second interlayer insulation film 22 and a protective film 32 are then formed on the silicon substrate to cover the fuse F entirely. Subsequently, a selection is then made whether that fuse F is cut or not and a high current is fed to the fuse F selected to be cut under a state applied with a high voltage through the nMOSFET 10 for cutting a fuse thus cutting that fuse F. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005166799(A) 申请公布日期 2005.06.23
申请号 JP20030401528 申请日期 2003.12.01
申请人 SEIKO EPSON CORP 发明人 TAGAKI MASATOSHI
分类号 H01L21/82;(IPC1-7):H01L21/82 主分类号 H01L21/82
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