| 摘要 |
PROBLEM TO BE SOLVED: To provide an MOPO system two-stage laser device which restrains ratio in which broad spectral component is contained while maintaining advantage of the MOPO system, especially advantage that amplification efficiency is high. SOLUTION: The two stage gas laser device for MOPO system exposure is constituted of a laser for oscillation which emits narrowbanded seed laser beam, and a laser for amplification which amplifies inputted seed laser beam. In the two-stage gas laser device under qualification wherein pulse energy P(MOPO) of laser beam which is emitted from the two-stage gas laser device turns into rated kinetic energy Es, it constitutes so that pulse energy P(AMP) of laser beam which is emitted when operating the laser for amplification independently and is not narrowbanded is set to about 0. COPYRIGHT: (C)2005,JPO&NCIPI |
