| 摘要 |
The present invention discloses an infrared bolometer including a signal bridge used for reading a resistance value varied by infrared heat and removing residual heat of a heat absorbing layer. The infrared bolometer includes a lower substrate having an integrated circuit coated with a protection layer, an upper substrate having an absorbing layer for absorbing infrared rays and a resistor whose resistance value is varied by the infrared heat absorbed by the absorbing layer and spaced apart from the lower substrate by a predetermined distance, a post for mechanically supporting the upper substrate and connecting the upper and lower substrate to each other, and a signal bridge arranged between the lower and upper substrates for transmitting a signal from the resistor of the upper substrate to the lower substrate. The infrared bolometer further includes a lower electrode formed on the top surface of the lower substrate for driving the signal bridge to be electrically connected/disconnected to/from the upper substrate, and a reflecting layer formed on the top surface of the lower substrate for increasing absorptivity of infrared heat.
|
