| 摘要 |
PROBLEM TO BE SOLVED: To provide a deposition film forming system and a deposition film forming method capable of drastically decreasing the image defects of an electrophotographic photoreceptor, improving the electrostatic chargeability of the electrophotographic photoreceptor, and reducing a cost by reducing the generation of spherical projections due to dust during deposition. SOLUTION: The deposition film forming system and the deposition film forming method form the deposition films having good characteristics on a plurality of cylindrical substrates by arranging the plurality of the substrates at equal intervals on the same circumference, arranging high-frequency electric power introducing means on the outside of a reaction vessel, and introducing the high-frequency electric power therein, wherein the high-frequency electric power introducing means are installed on a plurality of arrangement circles different in diameters. COPYRIGHT: (C)2005,JPO&NCIPI
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