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发明名称
METHOD OF FORMING CONTACT HOLE IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20050059475(A)
申请公布日期
2005.06.21
申请号
KR20030091099
申请日期
2003.12.15
申请人
HYNIX SEMICONDUCTOR INC.
发明人
KIM, YONG SOO;YANG, HONG SEON;JANG, SE AUG;LIM, KWAN YONG;CHO, HEUNG JAE;LEE, JUNG HO;OH, JAE GEUN
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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