METHOD AND APPARATUS FOR COATING A SUBSTRATE IN A VACUUM,申请号KR20027005091-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR COATING A SUBSTRATE IN A VACUUM
摘要
申请公布号	KR100495751(B1)	申请公布日期	2005.06.17
申请号	KR20027005091	申请日期	2002.04.19
申请人		发明人
分类号	C23C14/24;(IPC1-7):C23C14/24	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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