| 摘要 |
A temperature control assembly for use in etching processes includes a housing, a cooling conduit, fasteners, and a mounting block. The fasteners couple to the housing and operate to associate the cooling conduit, which is formed from a non-corrosive metallic material, with the housing. The mounting block is coupled to the cooling conduit. Also, a method for retrofitting an existing temperature control assembly includes removing an original cooling mechanism, selecting a retrofit cooling conduit formed from a non-corrosive metallic material, coupling fasteners to a housing of the temperature control assembly to associate the retrofit cooling conduit with the housing, and coupling a retrofit mounting block to the retrofit cooling conduit.
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