| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a member for flat panel display manufacturing equipment which improves the position accuracy of the equipment, and does not cause warping and strains to a back plate 22 and a front plate 23. <P>SOLUTION: In the member used for manufacturing a flat panel display, the back plate 22 with an electron source is confronted with the front plate 23 through a side wall 24, wherein a Young's modulus (E) is 120 GPa or more, specific rigidity (E/ρ) is 40×10<SP>9</SP>cm or more, and a coefficient of thermal expansion from a normal temperature to 500°C is 7.5×10<SP>-6</SP>to 10×10<SP>-6</SP>/°C, and the member is composed of ceramic of which the modulus of a void occupied area is 6% or less. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
