| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser inspection device capable of certainly inspecting a recessed part formed in a substrate at high speed. SOLUTION: This laser inspection device has: a light source 13 outputting laser light; irradiation means 5, 33, 34 irradiating the laser light 7 emitted from the light source 13 onto a desired position of a detected body 21; a detection means 2 detecting fluorescence 8 generated from the detected body 21 irradiated with the laser light 7; and a control means 31 making the irradiation means linearly scan a prescribed interval with a registered inspection point on the detected body 21 as a start point, detecting the fluorescence 8 to find a temporary center point, making the irradiation means scan in a direction perpendicular to the scanning direction through the center point, and making the detection means detect the fluorescence 8 to inspect the detected body. COPYRIGHT: (C)2005,JPO&NCIPI
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