发明名称 DRY AIR-SUPPLYING APPARATUS AND TREATING APPARATUS
摘要 Two rotors (18a, 18b) housing honeycomb structure bodies (25) that hold adsorbing agents are rotated by a common motor (19). A partition member (17) defines in each of the rotors an adsorbing zone (S) and a reproducing zone (U) depending on the positional relationship of rotation between the partition member (17) and the rotor corresponding to the partition member. In the adsorbing zone (S), the adsorbing agent removes moisture and organic matter from air passing through the adsorbing zone. In the reproducing zone (U), the adsorbing agent deteriorated through the absorption of moisture and organic matter is reproduced using heated dry air. Air sucked from a transportation space (10) of a treating apparatus (1) is passed through a circulation route (20), sequentially passed through the adsorbing zones of both rotors, and then returned to the space as the aimed space. Portion of the clean and dry air passed through the adsorbing zones is introduced in an air discharge route (21), heated by a heater, and passed through the reproducing zones of both rotors.
申请公布号 KR20050057144(A) 申请公布日期 2005.06.16
申请号 KR20057003700 申请日期 2005.03.03
申请人 NICHIAS CORPORATION;TOKYO ELECTRON LIMITED 发明人 TANAHASHI TAKASHI;ASANO TAKANOBU;NAKAO KEN;YAMASHITA KATSUHIRO
分类号 B01D53/06;B01D53/26;F24F3/14;(IPC1-7):B01D53/26;B01D53/02;F24F1/00 主分类号 B01D53/06
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