发明名称 WIRING SUBSTRATE COATING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a wiring substrate coating method for forming an etching resist layer of a specified pattern by immersing a wiring substrate having a through-hole and via in a photosensitive resist liquid and lifting it to cover the whole surface of an insulation substrate including the inner wall face of the through-hole and via. <P>SOLUTION: The immersion coating method for coating the wiring substrate having the through hole and comprises the steps of immersing the insulation substrate having metal conductor layers formed on the inner wall face of the through-hole and the two faces of the substrate and lifting it. The lifting speed is 1-8 mm/s. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005152736(A) 申请公布日期 2005.06.16
申请号 JP20030393206 申请日期 2003.11.25
申请人 MITSUI CHEMICALS INC 发明人 MORIMOTO HIDENOBU;MAKINO SHIGEO;YASUDA KIYOMI;TAWARA SHUJI
分类号 G03F7/16;B05D1/18;B05D7/24 主分类号 G03F7/16
代理机构 代理人
主权项
地址