发明名称 |
Magnetic energy filter |
摘要 |
A compact magnetic energy filter having at least four magnetic fields to deflect the trajectory of an electron beam from the entrance window to the exit slit. A rotational symmetry axis is located midway between the second and third magnetic fields. The magnetic fields on the opposite sides of the rotational symmetry axis are opposite in polarity. |
申请公布号 |
EP1058287(A3) |
申请公布日期 |
2005.06.15 |
申请号 |
EP20000304593 |
申请日期 |
2000.05.31 |
申请人 |
JEOL LTD. |
发明人 |
TSUNO, KATSUSHIGE;MUNRO, ERIC;ROUSE, JOHN |
分类号 |
G01B11/24;G01B11/245;G01B21/20;H01J37/05;H01J49/30;H01J49/46 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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