| 发明名称 |
Methods and apparatus for deriving thermal flux data for processing a workpiece |
| 摘要 |
Presented are methods, systems, and apparatus for deriving heat flux information and using heat flux information for a workpiece used in temperature sensitive processes.
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| 申请公布号 |
US6907364(B2) |
申请公布日期 |
2005.06.14 |
| 申请号 |
US20030664810 |
申请日期 |
2003.09.16 |
| 申请人 |
ONWAFER TECHNOLOGIES, INC. |
发明人 |
POOLLA KAMESHWAR;MUNDT RANDALL S. |
| 分类号 |
G01K17/20;(IPC1-7):G06F19/00 |
主分类号 |
G01K17/20 |
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