| 摘要 |
PROBLEM TO BE SOLVED: To realize a system LSI related to an LSI whose function can be revised, in particular, an LSI whose function is revised by using an MEMS switch to revise circuit connection. SOLUTION: An element whose function can be revised during operation is produced by using the bistable MEMS switch, and forming the MEMS switch through the utilization of a wiring layer of a CMOS semiconductor, indicating an ideal switch characteristic such that the ON resistance is as small as several ohms or below and the OFF resistance is infinite. Thus, the high speed semiconductor device with a small area can be realized, wherein a degree of the function revision is high. COPYRIGHT: (C)2005,JPO&NCIPI
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