| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which can suitably detect the voltage generated from a vibrator at vibration and which can realize a stable drive control. <P>SOLUTION: This piezoelectric actuator 1 includes the vibrator 2, having a reinforcing plate 21 and a piezoelectric element 22 and having a substantially rectangular shape as viewed planarly and vibrating, upon application of a drive voltage to the piezoelectric element 22 in a plurality of resonance modes; a contact part 3 installed on the reinforcing plate 21, brought into contact with an element R to be driven by the vibration of the vibrator 2 to drive the element R to be driven; a drive electrode 5 installed on the front surface of the piezoelectric element 2 and guiding the drive voltage to the piezoelectric element 22; and a detection electrode 6 installed on the front surface of the piezoelectric element 22 and detecting the output voltage generated from the piezoelectric element 22 at the vibration time of the vibrator 2. The center of gravity C of the detection electrode 6 is disposed in a quadrant where a straight line L of the quadrant applied passes to an x-axis and a y-axis. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
