Precursors to fluoroalkanol-containing olefin monomers and associated methods of synthesis and use

摘要

The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted alpha,beta-unsaturated esters. The fluoroalkanol-substituted alpha,beta-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.