| 摘要 |
PROBLEM TO BE SOLVED: To properly perform an operation for the flatness and the straightness of an object to be measured at high working efficiency, independently of the shape of a product to be inspected, by combining a simple measurement jig with a measuring apparatus. SOLUTION: In the flatness/straightness measuring apparatus, which includes a laser light source 1, a Wollaston prism interference device 2 disposed on the optical path of a laser light 1a emitted from the laser light source, and a reflective mirror 3 for reflecting the interference lights 1b and 1c linearly polarized by a Wollaston prism of the interference device 2 to the Wollaston prism, and which moves the interference device 2 along the surface to be measured, to measure the flatness and the straightness, the Wollaston prism interference device is mounted on a linear guide 8 in which a horizontal guide module 6 consisting of a straight guide rail 6a and a movable table 6b is combined with a vertical guide module 7 consisting of a vertical guide rail 7a and a movable table 7b. The laser light source and the reflective mirror are connected to both ends of the guide rail 6a, and the flatness or the straightness of the object to be measured is measured by moving the interference device in the state in which the linear guide is set on the surface to be measured. COPYRIGHT: (C)2005,JPO&NCIPI
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