| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit coater die by which a thin film can be formed uniformly at a high speed by adopting a die coater system and forming the lip surface of the slit coater die into a proper shape regardless of a surface-treated state of the lip surface. SOLUTION: This slit coater die 1 is constituted so that a coating liquid 10 is applied to the substrate 9 to be coated by discharging the coating liquid 10 from a slit 4 and moving the slit coater die relatively to the substrate 9 to be coated while keeping a predetermined gap between the slit coater die and the substrate 9 to be coated. At least one groove 8 extending along the longitudinal direction of the slit 4 is formed on the rear lip surface 7 which is one of two surfaces formed by halving the lip surface by the slit 4 for discharging the coating liquid 10 and is positioned on the downstream side of a stream of the discharged coating liquid 10. COPYRIGHT: (C)2005,JPO&NCIPI
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