| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator formed of piezoelectric ceramics that does not have hysteresis in the electricity-strain history. <P>SOLUTION: The piezoelectric actuator is formed by placing a piezoelectric ceramics layer over a substrate. The piezoelectric ceramics layer is formed of ceramics whose average gain size is not less than 0.01 μm and not more than 0.1 μm as observed under a scanning electron microscope. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
