| 发明名称 |
Vacuum system |
| 摘要 |
<p>A vacuum system comprises a first chamber (1) and a second high vacuum chamber (3) connected by a third chamber (2) that seals in the vacuum of the second chamber if the first chamber is evacuated from a pre-vacuum to a high vacuum through the third chamber. An independent claim is also included for a process for transporting objects in a vacuum.</p> |
| 申请公布号 |
EP1536454(A1) |
申请公布日期 |
2005.06.01 |
| 申请号 |
EP20040027862 |
申请日期 |
2004.11.24 |
| 申请人 |
SINGULUS TECHNOLOGIES AG |
发明人 |
KEMPF, STEFAN;MERZ, THOMAS;MUECKE, MICHAEL, DR. |
| 分类号 |
C23C14/56;H01L21/00;H01L21/67;H01L21/677;(IPC1-7):H01L21/00 |
主分类号 |
C23C14/56 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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