A DUAL WALLED EXHAUST ASSEMBLY, ION IMPLANTATION SYSTEM, AND A METHOD OF RECONSTRUCTING A DUAL-WALLED EXHAUST ASSEMBLY,申请号KR19980017936-传众专利搜索

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发明名称	A DUAL WALLED EXHAUST ASSEMBLY, ION IMPLANTATION SYSTEM, AND A METHOD OF RECONSTRUCTING A DUAL-WALLED EXHAUST ASSEMBLY
摘要
申请公布号	KR100466702(B1)	申请公布日期	2005.05.27
申请号	KR19980017936	申请日期	1998.05.19
申请人		发明人
分类号	F04B49/00;(IPC1-7):F04B49/00	主分类号	F04B49/00
代理机构		代理人
主权项
地址

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