| 发明名称 |
VACUUM CHUCK |
| 摘要 |
A vacuum chuck having a planar upper surface for holding a planar substrate for dicing using a dicing saw comprising a vacuum surface and a light source for illuminating at least an area of said substrate from below. |
| 申请公布号 |
WO2005048340(A1) |
申请公布日期 |
2005.05.26 |
| 申请号 |
WO2004IL01040 |
申请日期 |
2004.11.12 |
| 申请人 |
ADVANCED DICING TECHNOLOGIES LTD.;SHETRIT, GIL;SELA, OFER |
发明人 |
SHETRIT, GIL;SELA, OFER |
| 分类号 |
B28D5/00;H01L21/00;H01L21/683 |
主分类号 |
B28D5/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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