METHOD OF DECONTAMINATION AND DECONTAMINATION APPARATUS

摘要

First, hydrogen peroxide gas is formed. Subsequently, the hydrogen peroxide gas is charged in hermetically sealed decontamination chamber (2). The charged hydrogen peroxide gas is condensed in the hermetically sealed decontamination chamber (2) so that a condensed liquid layer is produced in the form of a thin film on the internal wall of the hermetically sealed decontamination chamber (2) and the external surface of decontamination subject (3) placed in the hermetically sealed decontamination chamber (2). Then, the produced condensed liquid layer is partially or wholly evaporated. After the evaporation, re-condensation of hydrogen peroxide gas is carried out to thereby form a new condensed liquid layer.