| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinding carrier by which sophisticated setting specifications adaptable to grinding of a thin member to be ground with a large area can be easily realized and workability and economical efficiency of the grinding can be improved. <P>SOLUTION: The grinding carrier has the following constitution. A metallic oxide glass film 22 is formed on the surface of a paper base material 21. A titanium nitride film 23 including boron, which is a first metallic sputtered film, is formed on the metallic oxide glass film 22. A nickel film 24 being an electroless plating film is formed on the titanium nitride film 23. A titanium oxide film 25 being a second metallic sputtered film is formed on the nickel film 24. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
