VACUUM COATING SYSTEM FOR COATING ELONGATE SUBSTRATES

摘要

The invention relates to a vacuum coating system for coating elongate substrates, said vacuum coating system having one or several coating sections and one or several pump sections, at least one magnetron in an arrangement as sputter-down-variants above the substrate which has a target surface opposite the upper side of the substrate and/or comprising an arrangement as sputter-up-variants below the substrate which has a target surface opposite the lower side of the substrate and a transport device. The aim of the invention is to form an inline coating system for the two lateral coatings of elongate substrates, wherein construction costs and space required are reduced. The aim of the invention is achieved by virtue of the fact that the transport device (9) is arranged in a divided manner on a drive plane (10) and on a transport plane (11). The drive plane (10) is arranged in such a manner that in the sputter-up-variants, the underside of a magnetron body containing the magnetron (4) lies above the drive plane (10).