| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical thin film which is hardly oxidized in the metallic layer even if irradiated with light in vacuum ultraviolet region and which tends to suppress lowering of optical performance. <P>SOLUTION: The optical thin film 3 has a dielectric layer 5 on the surface 1a side of the metallic layer 4, is irradiated with light in vacuum ultraviolet region emitted from the surface 1a side to the metallic layer 4. The dielectric layer 5 is provided with nonpermeability of water through the amorphous structure of the dielectric material. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
