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发明名称
CLUSTER TYPE OF APPARATUS FOR DEPOSITION AND METHOD FOR MANUFACTURING THIN FILM TRANSISTORS USING THE SAME
摘要
申请公布号
KR20050045367(A)
申请公布日期
2005.05.17
申请号
KR20030079417
申请日期
2003.11.11
申请人
LG.PHILIPS LCD CO., LTD.
发明人
PARK, CHAN IL
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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