发明名称 |
Orientation dependent shielding for use with dipole illumination techniques |
摘要 |
A method of printing a pattern having vertically oriented features and horizontally oriented features on a substrate utilizing dipole illumination, which includes the steps of: identifying background areas contained in the pattern; generating a vertical component mask comprising non-resolvable horizontally oriented features in the background areas; generating a horizontal component mask comprising non-resolvable vertically oriented features in the background areas; illuminating said vertical component mask utilizing an X-pole illumination; and illuminating said horizontal component mask utilizing a Y-pole illumination.
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申请公布号 |
US2005102648(A1) |
申请公布日期 |
2005.05.12 |
申请号 |
US20030626858 |
申请日期 |
2003.07.25 |
申请人 |
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发明人 |
HSU STEPHEN D.;CORCORAN NOEL;CHEN JANG F. |
分类号 |
G03F1/08;G03F1/14;G03F7/20;H01L21/027;(IPC1-7):G06F17/50;G03C5/00;G21K5/10;H01J37/08 |
主分类号 |
G03F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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