发明名称 |
Apparatus and method for measuring micro mass using oscillation circuit |
摘要 |
A micro mass measuring apparatus includes a cantilever on which a subject is attached, a piezoelectric element formed on the cantilever, an oscillation circuit for actively vibrating the cantilever and providing a varied resonance frequency by the subject, and a frequency measuring device for measuring a resonance frequency of the cantilever.
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申请公布号 |
US2005097962(A1) |
申请公布日期 |
2005.05.12 |
申请号 |
US20040974455 |
申请日期 |
2004.10.27 |
申请人 |
LEE SOO-SUK;MOON WON-KYU;LEE YEOL-HO |
发明人 |
LEE SOO-SUK;MOON WON-KYU;LEE YEOL-HO |
分类号 |
G01N5/02;G01G3/16;G01L9/00;G01N27/00;(IPC1-7):G01N29/00 |
主分类号 |
G01N5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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