CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged-particle-beam system capable of minimizing the vibration of a sample generated by floor vibration or sound. SOLUTION: A vertical part of a tilt table is formed of a material, having a longitudinal elasticity coefficient larger than that of a horizontal part of the tilt table. In addition, the vertical part of the tilt table is formed of the material, having specific gravity larger than that of the horizontal part of the tilt table. COPYRIGHT: (C)2005,JPO&NCIPI