| 摘要 |
<p>Rails 20 corresponding to lines A, B, C are provided in parallel on a base plate 1, and coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22. <IMAGE></p> |
| 申请人 |
TOKYO ELECTRON LIMITED;CKD CORPORATION;FUJIKIN INC. |
发明人 |
HOSHI, GEORGE.;OKABE, TSUNEYUKI;GOSHIMA, KENICHI;KOBAYASHI, HIDEO;NAGAYA, AKINORI;YAMAJI, MICHIO;YOSHIKAWA, KAZUHIRO;KAWANO, YUJI |
