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发明名称
SYSTEM, METHOD AND COLLIMATOR FOR OBLIQUE DEPOSITION
摘要
申请公布号
AU2003272739(A1)
申请公布日期
2005.05.11
申请号
AU20030272739
申请日期
2003.09.29
申请人
SEAGATE TECHNOLOGY LLC
发明人
KALMAN PELHOS
分类号
C23C14/22;G11B5/85;H01J37/34;(IPC1-7):G11B5/00;C23C14/04
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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