发明名称 Electron beam array write head system and method
摘要 An e-beam system generates a set of massively parallel beams of order of magnitude 1,000 by employing a flash eprom to store calibration data and to receive on/off signals directed through the address system of the memory array, the individual electron sources being mounted above the memory array in a geometric array that tracks the structure of the memory array.
申请公布号 US6891169(B2) 申请公布日期 2005.05.10
申请号 US20030348658 申请日期 2003.01.21
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BUKOFSKY SCOTT JOSEF;CHEN BOMY ABLE;EAMES SARA JENNIFER;WU QIANG
分类号 H01J37/073;H01J1/304;H01J37/305;H01J37/317;H01L21/027;(IPC1-7):H01J37/30;H01J29/70;H01J29/72 主分类号 H01J37/073
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