发明名称 |
Electron beam array write head system and method |
摘要 |
An e-beam system generates a set of massively parallel beams of order of magnitude 1,000 by employing a flash eprom to store calibration data and to receive on/off signals directed through the address system of the memory array, the individual electron sources being mounted above the memory array in a geometric array that tracks the structure of the memory array.
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申请公布号 |
US6891169(B2) |
申请公布日期 |
2005.05.10 |
申请号 |
US20030348658 |
申请日期 |
2003.01.21 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BUKOFSKY SCOTT JOSEF;CHEN BOMY ABLE;EAMES SARA JENNIFER;WU QIANG |
分类号 |
H01J37/073;H01J1/304;H01J37/305;H01J37/317;H01L21/027;(IPC1-7):H01J37/30;H01J29/70;H01J29/72 |
主分类号 |
H01J37/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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