发明名称 |
FILM AND METHODS OF FORMING SAME |
摘要 |
A film and method of forming a film provides an unmodified starting layer of a starting material, the starting layer having opposed first and second surfaces and an initial thickness, T1, and a modified surface layer of thickness T2 which is less than T1, formed in at least a portion of the second surface, wherein a portion of the modified surface layer is not supported by unmodified starting material removed from the first surface opposite the modified surface layer. |
申请公布号 |
WO2014190077(A1) |
申请公布日期 |
2014.11.27 |
申请号 |
WO2014US39011 |
申请日期 |
2014.05.21 |
申请人 |
EXOGENESIS CORPORATION;KIRKPATRICK, SEAN, R.;CHAU, SON |
发明人 |
KIRKPATRICK, SEAN, R.;CHAU, SON |
分类号 |
G03F1/50 |
主分类号 |
G03F1/50 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|