MULTI ARRANGED FLAT ELECTRODE PLATE ASSEMBLY AND VACUUM PROCESS CHAMBER USING THE SAME,申请号KR20030014489-传众专利搜索

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发明名称	MULTI ARRANGED FLAT ELECTRODE PLATE ASSEMBLY AND VACUUM PROCESS CHAMBER USING THE SAME
摘要
申请公布号	KR100488057(B1)	申请公布日期	2005.05.06
申请号	KR20030014489	申请日期	2003.03.07
申请人		发明人
分类号	H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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