SLUICE SYSTEM FOR A VACUUM FACILITY

摘要

The invention relates to a sluice system for a vacuum coating facility (1) for coating substrates that can be moved through the vacuum coating in a direction of conveyance. On the input and output sides, said sluice system comprises a prevacuum sluice chamber (2) and a transfer chamber (3) adjoining a coating chamber (4), wherein a fine vacuum can be regulated before the transfer chamber on the input side in the direction of conveyance and after the transfer device on the output side in the direction of conveyance. The prevacuum sluice chamber (2) is directly adjacent to the transfer chamber (3) and the fine vacuum can be regulated in the prevacuum sluice chamber (2).