发明名称 Semiconductor-on-insulator chip with<100>-oriented transistors
摘要 A semiconductor-on-insulator device includes a silicon active layer with a &lt;100&gt; crystal direction placed over an insulator layer. The insulator layer is placed onto a substrate with a &lt;110&gt; crystal direction. Transistors oriented on a &lt;100&gt; direction are formed on the silicon active layer.
申请公布号 US2005093105(A1) 申请公布日期 2005.05.05
申请号 US20040901763 申请日期 2004.07.28
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 YANG FU-LIANG;YEO YEE-CHIA;CHEN HUNG-WEI;TSAO TIM;HU CHENMING
分类号 H01L21/8238;H01L21/84;H01L27/12;H01L29/04;H01L29/10;H01L29/786;(IPC1-7):H01L29/04 主分类号 H01L21/8238
代理机构 代理人
主权项
地址