发明名称 Method for fabricating thin film transistor with multiple gates using metal induced lateral crystallization
摘要 A thin film transistor with multiple gates using an MILC process which is capable of materializing multiple gates without increasing dimensions and a method thereof. The thin film transistor has a semiconductor layer which is formed on a insulating substrate in a zigzag shape; and a gate electrode which is equipped with one or more slots intersecting with the semiconductor layer, the semiconductor layer includes two or more body parts intersecting with the gate electrode; and one or more connection parts connecting each neighboring body part, wherein a part overlapping the semiconductor layer in the gate electrode acts as a multiple gate, and MILC surfaces are formed at a part which does not intersect with the gate electrode in the semiconductor layer.
申请公布号 US2005093065(A1) 申请公布日期 2005.05.05
申请号 US20040011584 申请日期 2004.12.15
申请人 发明人 SO WOO-YOUNG
分类号 H01L21/20;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/423;H01L29/786;(IPC1-7):H01L21/00;H01L27/01;H01L31/039;C30B1/00;H01L21/36 主分类号 H01L21/20
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