发明名称 |
Method and apparatus for unloading substrate carriers from substrate carrier transport system |
摘要 |
A substrate loading station includes a load/unload mechanism which unloads substrates or substrate carriers from a conveyor and loads substrates or substrate carriers onto the conveyor. The load/unload mechanism includes a rotary arm that rotates to match the speed of the conveyor to lift a substrate or substrate carrier off the conveyor or to lower a substrate or substrate carrier into engagement with the conveyor.
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申请公布号 |
US2005095110(A1) |
申请公布日期 |
2005.05.05 |
申请号 |
US20030650481 |
申请日期 |
2003.08.28 |
申请人 |
LOWRANCE ROBERT B.;RICE MICHAEL R.;ELLIOTT MARTIN R.;HUDGENS JEFFREY C.;ENGLHARDT ERIC A. |
发明人 |
LOWRANCE ROBERT B.;RICE MICHAEL R.;ELLIOTT MARTIN R.;HUDGENS JEFFREY C.;ENGLHARDT ERIC A. |
分类号 |
H01L21/677;(IPC1-7):B66C1/00 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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