发明名称 |
LARGE AREA SUBSTRATE PROCESSING SYSTEM |
摘要 |
A system and method for processing large area substrates is provided. In one embodiment, a processing system includes a transfer chamber having at least one processing chamber and a substrate staging system coupled thereto. The staging system includes a load lock chamber having a first port coupled to the transfer chamber and a heat treating station coupled to a second port of the load lock chamber. A load lock robot is disposed in the load lock chamber to facilitate transfer between the heat treating station and the load lock chamber.
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申请公布号 |
KR20050042191(A) |
申请公布日期 |
2005.05.04 |
申请号 |
KR20057004122 |
申请日期 |
2005.03.10 |
申请人 |
APPLIED MATERIALS INC |
发明人 |
BACHRACH, ROBERT, Z.;BLONIGAN, WENDELL, T. |
分类号 |
B65G49/06;F27B13/00;F27D3/00;H01L21/00;H01L21/02;H01L21/677;H01L21/68;(IPC1-7):H01L21/02 |
主分类号 |
B65G49/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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