| 摘要 |
A substrate-storing container capable of preventing a substrate and a clean environment for processing the substrate from being contaminated because of production of wear powder. A substrate-storing container has a front opening box-type container main body for storing plural substrates in an orderly manner, a cover body for opening and closing in a sealable manner an opened front face of the container main body, and an inner pressure-adjusting mechanisms fitted in the container main body and in an installation portion for the cover body, and for adjusting inner pressure of the container main body closed by the cover body. The inner pressure-adjusting mechanisms each structured of an elastic installation tube, a filter holder fitted and protected in the installation tube, and plural filters held in the filter holder. Installation holes are provided in the container main body and the cover body, so that the inner pressure adjusting-mechanisms can be installed only by installing the installation tubes, with a simple construction, in the installation holes with the tubes deformed elastically. Therefore, screw holes that are complex to process are not required, and the construction of a die for forming the container main body does not become complex.
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