| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma potential measuring probe which can evenly generate a local high frequency electric field around an ionic current detecting inner electrode. <P>SOLUTION: The plasma potential measuring probe includes a one-side electrode formed of a cylinder 17 for applying a high frequency, an opposite side electrode for applying the high frequency facing the end face of the cylinder 17 while keeping a gap from the end of the cylinder 17, a floating potential detecting electrode 2, and an ionic current detecting inner electrode 2a arranged in a space which is surrounded by these both side electrodes for applying the high frequency. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
