| 摘要 |
PROBLEM TO BE SOLVED: To provide a transmission electron microscope having a phase plate and a phase plate lens system by which a high quality of image can be obtained stably. SOLUTION: In the image formation system on the image side than an objective lens, a phase plate is arranged at the rear side than the rear focal plane of the objective lens, and a phase plate lens system which forms a conjugate plane of the rear focal plane of the objective lens is arranged between the objective lens and the phase plate, and a magnetism-proof tube having a magnetic shielding structure made of a high magnetic permeability material is provide at the surrounding of an electron beam passage passing the phase plate. COPYRIGHT: (C)2005,JPO&NCIPI
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