| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tool for firing a ceramic product, such as a setter and a sagger, which is suitable for firing various ceramic products, especially an electronic component such as a laminated capacitor, a piezoelectric element and a thermistor, and its manufacturing method. <P>SOLUTION: The tool for firing the ceramic product is manufactured by forming a zirconia coating layer on the surface of a ceramic substrate. The coating layer is formed from a mixture of zirconia and a zirconia precursor which is chemically changed into zirconia by firing. The coating layer is densified by the co-existence of the produced zirconia derived from the zirconia precursor and zirconia having a diameter larger than that of the produced zirconia in the coating layer. The adhesion strength of the coating layer to the substrate is improved by embedding of the produced zirconia in the substrate. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
